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Are you printing them vertical or horizontal?? I've found that I get better prints vertical.
One of the early comments was lack of resin runoff all the way down to the cured surface. @Chris333 likes to pull the parts off before curing (I get it about the thin cross section) but maybe there is excess resin still layering the print-cured part that gets cured atop the print when the UV station is used, making the parts rounded and "bloomed". ...
Confirmed - vertical orientation and 5 seconds for exposure yields a useful result. "Walls" are still +0.002" over the data, so I will adjust the art accordingly. I also slightly suspect the 100-second times for the raft layers might be pre-exposing anything at the bottom of the shortest supports. I'll cut that back to 80 seconds, the original 50 secs were detaching from the platform.
The Z plane has generally been very good.
I believe that Photon will always grow parts slightly. I've heard about a program that will shrink models to make up for this.